Pumping Ring
The PUMP ring is one of the key components, contributing to the stability improvement and energy consumption reduction of core processes like CVD (Chemical Vapor Deposition).
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Product Characteristics
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产品参数
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Product Characteristics
High Precision
High precision equipment parts are fundamental for semiconductor chip manufacturing, especially at the nanometer scale. Component precision directly determines the accuracy of wafer processing equipment and the implementation of its various process functions.
High Cleanliness
High-cleanliness equipment components are fundamental for achieving high yield rates in wafer processing. The cleanliness of process equipment directly determines the yield rate of wafers in process and subsequent chips, even determining if an entire production line can produce qualified products.
产品参数
| Material: | Aluminum Alloy |
| Dimensional Accuracy: | 0.02mm |
| Surface Treatment: | Coating + Precision Cleaning |
