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Nanofilm Technology

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Nanofilm Technology

Technology Features

High Cleanliness

01

Strong Chemical Corrosion Resistance

02

Application Scenarios

These coatings find application in aggressive chemical environments, such as HCl/Cl₂/F₂ gas atmospheres, and as protective liners for the internal surfaces of corrosive gas delivery lines and critical components, including showerheads in ALD/CVD reactors.

These coatings find application in aggressive chemical environments, such as HCl/Cl₂/F₂ gas atmospheres, and as protective liners for the internal surfaces of corrosive gas delivery lines and critical components, including showerheads in ALD/CVD reactors.

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